Fabrication of Ordered Arrays of InP Microstructures by Wet Chemical Etching with Au Masks
Ordered arrays of InP microstructures have been fabricated on InP(001) substrates by wet chemical etching in aqueous HCl with patterned Au masks. The masks were produced by Au deposition through copper grids or a monolayer of polystyrene microspheres. Square InP mesas (20 × 20 m) and pillars (~100 nm in both diameter and height) were both produced and characterized by scanning electron microscopy and atomic force microscopy.
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Document Type: Research Article
Affiliations: Nanoscale Physics Research Laboratory, School of Physics and Astronomy, The University of Birmingham, Edgbaston, Birmingham B15 2TT, United Kingdom
Publication date: 2002-12-01
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