Three-Dimensional Micropatterns of Well-Aligned Carbon Nanotubes Produced by Photolithography
Authors: Qidao Chen; Liming Dai
Source: Journal of Nanoscience and Nanotechnology, Volume 1, Number 1, March 2001 , pp. 43-47(5)
Publisher: American Scientific Publishers
Abstract:
Three-dimensional micropatterns of well-aligned carbon nanotubes were prepared on photolithographically prepatterned substrates by pyrolysis of iron(II) phthalocyanine (FePc) under an Ar/H2 atmosphere at 800-1100 °C. The photopatterning was achieved by photolithographic cross-linking of a chemically amplified photoresist layer spin-cast on a quartz plate or a silicon wafer, coupled with solution development. Owing to an appropriate surface characteristic, the patterned photoresist layer was found in this case to support aligned carbon nanotube growth by pyrolysis of FePc, as were the photoresist-free substrate surfaces. The difference in chemical nature between the surface areas covered and uncovered by the photoresist film, however, caused a region-specific growth of the nanotubes with different tubular lengths and packing densities, leading to the formation of three-dimensional aligned nanotube patterns suitable for various device applications.Keywords: CARBON NANOTUBES; PHOTOLITHOGRAPHY; THREE-DIMENSIONAL MICROPATTERNS; PHOTORESIST
Document Type: Research article
DOI: http://dx.doi.org/10.1166/jnn.2001.003
Affiliations: 1: CSIRO Molecular Science, Bag 10, Clayton South, Victoria 3169, Australia
Publication date: 2001-03-01
- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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