Molecular Dynamics Simulation of Nanoimprinting Under a High-Frequency Vibration Perturbation

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Abstract:

Nanoimprinting is a simple and efficient way to generate nanopatterns over a large area by pressing a master mould to penetrate into the surface of a substrate. It is known that interfacial friction force is a main factor responsible for pattern defects in nanoimprints. Here, nanoimprinting of metals by carbon nanotube arrays under a high-frequency vibration perturbation were studied via molecular dynamics simulations. The effect of mechanical vibration on material deformation and imprint force during nanoimprinting were examined. The results show that the pressing and frictional forces can be reduced significantly by exciting the mechanical resonances of the nanoimprinting system. The friction reduction strongly depends on the frequency and amplitude of the vibration. This work demonstrates that the nanoimprinting process can be controlled by external vibration, which may have an important implication for defect prevention in nanoimprinting.

Keywords: CARBON NANOTUBE; FRICTION; METAL; MOLECULAR DYNAMICS; NNANOIMPRINT; VIBRATION

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jctn.2012.1993

Publication date: January 1, 2012

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  • Journal of Computational and Theoretical Nanoscience is an international peer-reviewed journal with a wide-ranging coverage, consolidates research activities in all aspects of computational and theoretical nanoscience into a single reference source. This journal offers scientists and engineers peer-reviewed research papers in all aspects of computational and theoretical nanoscience and nanotechnology in chemistry, physics, materials science, engineering and biology to publish original full papers and timely state-of-the-art reviews and short communications encompassing the fundamental and applied research.
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