A Molecular Dynamics Study of Laser-Assisted Cleaning: Energy Transfer Medium-Contaminant Particle Interaction

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Abstract:

Two-dimensional molecular dynamics simulations are carried out to examine the significance of energy transfer medium (ETM)-contaminant particle interaction for laser cleaning. Cleaning efficiencies at different temperatures are determined for the cases where laser light is absorbed by the substrate in the presence of a wetting or a non-wetting ETM. It is shown that a strong particle-ETM interaction is needed to facilitate cleaning when the dry laser cleaning (DLC) mechanism is not effective. The contribution of the DLC mechanism to cleaning in cases of wetting and non-wetting ETMs is also investigated via simulations where laser light is absorbed by the particle as well as the substrate.

Keywords: LASER CLEANING; MOLECULAR SIMULATIONS; PARTICLE CONTAMINATION; SEMICONDUCTOR MANUFACTURING

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jctn.2007.009

Publication date: May 1, 2007

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  • Journal of Computational and Theoretical Nanoscience is an international peer-reviewed journal with a wide-ranging coverage, consolidates research activities in all aspects of computational and theoretical nanoscience into a single reference source. This journal offers scientists and engineers peer-reviewed research papers in all aspects of computational and theoretical nanoscience and nanotechnology in chemistry, physics, materials science, engineering and biology to publish original full papers and timely state-of-the-art reviews and short communications encompassing the fundamental and applied research.
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