Authors: Wong, Basil T.; Mengüç, M. Pinar; Vallance, R. Ryan

Source: Journal of Computational and Theoretical Nanoscience, Volume 3, Number 2, April 2006 , pp. 219-230(12)

Publisher: American Scientific Publishers

Abstract:

A methodology is presented for nanometer-size patterning of a workpiece using both an electron-beam and a laser. A Monte Carlo/Ray Tracing technique is used in modeling the electron-beam propagation inside a thin gold film. This approach is identical to that of a typical Monte Carlo simulation in radiative transfer except that proper electron scattering properties are employed. The laser propagation within the one-dimensional, non-scattering film on top of a quartz substrate is modeled using a ray-tracing approach and reflections at the boundaries are accounted for with the Fresnel-expressions. The temperature distribution inside a gold film is then predicted using the Fourier law of heat conduction, after evaluating the accuracy of the model for the range considered. A sequential nano-pattern is created using these coupled numerical simulations. The procedure we present here is the first to outline the sequential nano-machining processes and likely to guide the experimental studies to success with less trial-and-error attempts.

Keywords: ELECTRON-BEAM PROPAGATION; MONTE CARLO; NANO-MACHINING; MATERIAL PROCESSING; THERMAL CONDUCTION

Document Type: Research article

DOI: http://dx.doi.org/10.1166/jctn.2006.003

Publication date: 2006-04-01

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• Journal of Computational and Theoretical Nanoscience is an international peer-reviewed journal with a wide-ranging coverage, consolidates research activities in all aspects of computational and theoretical nanoscience into a single reference source. This journal offers scientists and engineers peer-reviewed research papers in all aspects of computational and theoretical nanoscience and nanotechnology in chemistry, physics, materials science, engineering and biology to publish original full papers and timely state-of-the-art reviews and short communications encompassing the fundamental and applied research.
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