CBD Grown Aligned ZnO Nanorods Based Methane Sensor and the Effect of Pd Sensitization
In the present paper we report the fabrication of a high response thin film methane sensor using Chemical Bath Deposition (CBD) grown ZnO nanorods, and the effect of Pd surface sensitization on the performance of the sensor. The aligned rods were fabricated on a seeded SiO2/Si substrate by a simple low temperature CBD technique by reacting Zinc Acetate and hexamethylenetetramine (HMT) precursors at 75 °C for 1 h. The samples were characterized with FESEM, EDS, XRD and X-Ray mapping showing the formation of high quality aligned ZnO nanorods and good distribution of the Pd metal nanoclusters throughout the sample. The sensitized and the unsensitized samples were tested at different temperatures (150, 200 and 250 °C) for their sensitivity towards different concentrations (0.1, 0.5 and 1.0%) of methane. The Pd surface sensitized sensors showed significant improvement over the unsensitized sensors in terms of response magnitude, response time and recovery time. The measurements revealed that Pd sensitized CBD grown ZnO nanorods can act as a very good methane alarm sensor with 200 °C as the optimum operating temperature with a very high response magnitude and reasonably short response time respectively for low methane concentration.
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Document Type: Research Article
Publication date: 2010-12-01
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